Abstract: Confocal microscopy is an essential component of wafer defect detection systems. Wafers are raw materials used in the manufacture of semiconductor chips. The semiconductor chip manufacturing ...
Abstract: We build a chip-scale confocal microscope using a 30-element optical phased array. We perform depth sensing by dynamically scanning the focal length and ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback