Finally, the thin films were annealed at 100°C for 30 min in ambient air. The thickness of the obtained thin films was measured with a Bruker Dektak XT Stylus profilometer and was estimated to be (130 ...
Follow Bruker and explore the latest applications of AFM in the semiconductor industry with a panel of experts. What are the recommended cantilevers for measuring the mechanical properties of ...
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To mitigate damage caused by sputtering, it is crucial to carefully control the sputtering parameters, such as pressure, deposition rate, deposition time, substrate temperature, and ...
Department of Materials Science and Engineering, University of Central Florida, Orlando, Florida 32826, United States Biionix Cluster, University of Central Florida, Orlando, Florida 32827, United ...