Strontium titanate is a material of considerable interest for electronic applications. A recent study revealed that strontium titanate (STO) annealed in strontium oxide (SrO) powder exhibits large ...

Abstract: A next generation system and methodology for high-throughput e-beam hot spot inspection is described. Rather than capturing images of each hot spot, just a single pixel centered on the ...

Detecting macro-defects early in the wafer processing flow is vital for yield and process improvement, and it is driving innovations in both inspection techniques and wafer test map analysis. At the ...