White light interferometry (WLI) is a contact-free optical method for measuring surface height. It uses the phase difference between the light reflected off a reference mirror and the target sample to ...
White light interferometry (WLI) is a contact-free optical method for measuring surface height. It uses the phase difference between the light reflected off a reference mirror and the target sample to ...
This article outlines how to measure, control, and stabilize the relative distance of two interferometer paths to sub-wavelength precision over numerous wavelengths, using the Zurich Instruments MFLI ...
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